Smoke Generator, Portable Model 2001 Cleanroom Fogger, M2001 fogger to visualize airflow and turbulence

Applied Physics, Inc.


Applied Physics, Inc.

Call Us: 1-720-635-3931

Wafer Size Standards

Clean Room Foggers

Ultrapure Foggers

PSL Spheres, Silica Particles

Aerosol Product Information

Clean Room, Model 2001 Portable Fogger

The Model 2001, Nitrogen Fog Generator is a cleanroom fogger using Distilled Water and Liquid Nitrogen to create a very dense fog for 35-40 minutes duration providing a constant fog volume of 15cfm to visualize airflow, patterns and turbulence in Pharmaceutical ISO suites, sterile rooms and barrier isolators. No contamination is created and no clean up afterwards is required.

Model 2001 Portable Fogger, 15cfm of Ultrapure fog for 35-40 minutes

The Model 2001 Clean Room Fogger is used as a smoke generator in smoke studies. This fogger uses LN2 and DI Water to produce 15cfm of ultrapure fog, using a quenching process, combining LN2 and DI Water to produce a visualizing fog with high fog density, which is truly pure. The M2001 is used in pharmaceutical ISO suites. Model 2001 Portable Fogger supports USP 797 Pharmaceutical In-Situ Airflow Analysis in clean rooms and Pharmaceutical ISO suites.

The M2001 Fogger uses LN2, liquid nitrogen, to provide ultrapure fog, highest fog density and provides the visible distance of 12 to 15 feet to visualize turbulent airflow. Ultra pure fog is directed to visualize turbulent air flows. High purity fog is generated by boiling the DI water, which is generally a 16 Meg Ohm, pure DI Water; and combining with Nitrogen molecules that result from LN2 boiling. As the DI water boils, it provides additional water purity by drawing any remaining positive charged particles to the grounded water cavity. As the water molecules travel towards the output, the water molecules combine with nitrogen molecules to form an ultrapure fog droplet, which is high in density and very low in forward pressure. It is a unique, patented quenching process. The ultra pure water fog is neutrally buoyant, non-contaminating, and highly visible in airflow so as to describe turbulence, patterns air flow balance.

Other fog generators or smoke generators are used in smoke studies to produce fog by an ultrasonic atomization with transducers (DI water foggers) or by using a dry-ice process, called CO2 foggers. CO2 foggers produce a short period of airflow, thus the Model 2001 Fogger is far more useful.  DI Water Foggers use a fan to push the fog out, which induces a minor disturbance into the airflow. Ultrapure Clean room Foggers create a particle free, non-contaminating fog, leaving no residue behind as the ultra pure fog evaporates. The fog enters the airflow at very low pressure, thus it does not create a turbulence. The M2001 fogger is one of two clean room foggers suitable for use in Class 1 - 100,000 clean rooms to visualize airflow, and turbulence, air flow balance and studies of wafer transports around process tools in semiconductor fabs. The Model 2001 is a portable fogger with handles to carry it from location to location. The M2001 is well known by Pharmaceutical Facility Managers as an ultrapure fogger to support USP 797 Pharmaceutical In-Situ Airflow Analysis to visualize turbulence, patterns and unidirectional flow in ISO 1 to ISO 9 Pharmaceutical suites. The M2001 smoke generator provides carrying handles for portability and convenience.

Model 2001 Portable Fogger Features - Request a Quote

Model 2001 cleanroom fogger
  • Model 2001 Portable Fogger
  • High fog density with 15 cfm of fog volume for 40 minutes
  • Truly non-contaminating, ultrapure fog
  • No measurable contaminating residue upon evaporation of water droplets
  • Compact, easily transportable package with stream or fog rake output
  • M2001, Ultra pure, Clean room Fogger - A compact, ultra pure LN2 fogger with very high fog density producing 15cfm+ fog volume for 35-40 minutes operation. Designed for Class 1, 10, 100, 1000, 10000, 100,000 Clean Rooms and ISO 1 to ISO 9 Pharmaceutical suites.
  • Ultrapure fogger visualization of airflow and turbulence in clean rooms
  • Exhaust and ventilation studies around wafer handling systems
  • Air balance studies in Pharmaceutical suites and clean rooms

Model 2001 Portable Fogger Benefits - Request a Quote

M2001 Fogger
  • Dense fog by converting 342 ml of liquid per minute to an ultrapure fog
  • Visible airflow distances of 10-15 feet
  • Fog volume of ultrapure fog at 2 cubic meters per minute
  • Total volume of ultrapure fog at 70 cubic meters of fog over 35 minutes
  • Longest operating time of 90 minutes
  • Fog density is desired as high as possible to increase visibility of airflow
  • Fog time is desired as high as possible to increase time on site testing
  • Fog visualization is desired as far as possible to extend effects of fog in the airflow
  • Fog output pressure is desired as low as possible so that pressurized fog does not create its own turbulence
  • White Powder Coat paint of metal enclosure to prevent metal contamination to the fog
  • The Fog Tube should be flexible and made of material that does not add particulate contamination to the fog

* Fog distance measured at typical 40% humidity and air velocity of 90fpm. Fog distance decreases as humidity decreases or as airflow velocity increases.

** Electrolus SS coatings prevents metal contact with fog, thus minimizes possibility of metal contamination to the fog output.

Model 2001, UltraPure LN2 Fogger

Specifications, Model 2001 Clean Room Fogger- Request a Quote
(Subject to change without notice)

  Model 2001 Ultrapure Fogger
FOG Duration up to 37.5 minutes
FOG Volume 2 cubic meters per minute
Total FOG Volume 75 cubic meters of ultrapure fog over 37.5 minute operation cycle
Visible Fog Distances 10-15 feet
FOG Type Ultrapure Fog using LN2 and DI Water, or LN2 and WFI Water
Class of Clean Room Class 1 to 10,000
Type of Room Clean Room, Sterile Room, ISO Suite, Medical Room
Water Boiler capacity 3.0 liters
LN2 Dewar capacity 9 Liters

Liquid Weight 6.4 kg (14 lb.) LN2 and 2.89 Kg (6.36 lbs) Water
Power Requirements 115 VAC, 60 Hz, 14A
Optional Power 230 VAC, 50 Hz, 8A
Metric Dimensions, (H x W x D) 533mm x 381mm x 406mm
US Dimensions, (H x W x D) 21 inches x 15 inches x 16 inches
Full Weight 25 kg (55 lb.)

Which Clean Room Fogger or Smoke Generator Is Best For My Applications?

M2001 Fogger for smoke studies providing 15 cfm or more ultrapure fog
  • When fog purity and long, visible airflow patterns are needed
  • When fogging larger clean rooms, ceiling to floor areas
  • When fog exit velocity must not create turbulence
  • When 35 to 40 minutes of high purity fog duration is needed
  • When fog visibility of 12-15 feet distance is required
  • When fogging Class 1 to Class 10,000 semiconductor clean rooms and ISO 1 to ISO 9 pharmaceutical suites

* Use Hand Gloves and Face Shield when filling LN2
Use 16M ohm DI water or WFI Pharmaceutical Water
Clean Room Fogger, 8cfm
  • When budget is lower, basic Fogger OK, minimal output turbulence
  • When 60 minutes of fog duration is useful with quick turnaround
  • When fog visibility for 6-8 feet distance is acceptable
  • When fogging gray areas behind the cleanroom
  • When fogging ≥ Class 10 or above in semiconductor or pharmaceutical clean rooms

CO2 Fogger, Vapor DiH2O Fogger, 3cfm
  • When Fogging Hazardous areas, No Electrical Permitted
  • When fog visibility for 3-4 feet distance is acceptable
  • When 15 minutes of fog duration is useful
  • When fogging small areas
  • Class 10 or above in semiconductor or pharmaceutical clean rooms
  • When fogging work benches

Portable Fogger, DiH2O Fogger, 3cfm
  • When fogger PORTABILITY is a must
  • When fog visibility for 3-4 feet distance is acceptable
  • When 25 minutes of fog duration is useful with quick turnaround
  • When fogging ≥ Class 10 and above in semiconductor and pharmaceutical cleanrooms
  • When fogging "hard to get at" areas
16 Meg ohm DI water is standard, but 64 Meg ohm can be used as well
Do not permit DI Water to go stagnant in the chamber
** Use gloves when handling CO2 ice

Fogger Technology

The three types of foggers manufactured for use in the semiconductor and pharmaceutical industry are described below.

Ultrapure Fogger: This type of fogger provides the highest volume, density and purity of fog. Purity is created by bringing the water to a boil, creating a vapor, while simultaneously using gravity to remove the residual mass from the vapor. This process removes any bacterial agents and residual particulate matter from the vapor. The pure vapor is then passed over an LN2 bath, which naturally boils at room temperature. The water molecules quickly attach to the nitrogen molecules (quenching process), creating a nominal 3um fog droplet. The volume of water and nitrogen molecules that combine is extremely high in quantity, creating a dense, high volume, ultrapure fog output with exit temperatures of about 80 degrees F with an exit pressure of = 0.5 lbs, so as not to disturb the surrounding airflow. The fog is ultrapure leaving minimal, if any, trace particles behind. It evaporates to its gaseous hydrogen, oxygen and nitrogen components, which are natural to the Cleanroom environment. The high density of the fog increases the duration and travel distance of the fog. This fogger can be used in any class Cleanroom environment.

DI Water Fogger: This type of fogger has less fog density (less capability to visualize airflow) than the UltraPure Fogger described above, but more density than the CO2 fogger described below. The DI water fog is generated by atomizing DI water into water droplets, which are nominally 3-10um in size. The water droplets may contain residual particulate matter remaining in the DI water, but this would be very trace amounts. If the facility manager operates a class 10 to Class 10000 Clean room, the use of a DI Water Fogger poses no problem. However, Cleanroom Engineers who manage facilities operating at Class 1 to Class 10 performance may desire to use an ultrapure fogger. Although some DI Water foggers are described as ultrapure, unless the DI water is vaporized to remove bacterial agents and residual particulate matter, the fog is not ultrapure. The 3-5lb output pressure of a DI water fogger also distorts the airflow patterns, thus adding to the turbulence. The temperature output is typically less than the surrounding room temperature, thus a fog generated from the atomized water droplets will sink momentarily in a typical 70 degree room temperature.

CO2 Fogger: This type of fogger is designed for low volume, non-process critical applications such as bench airflow testing. The fog is created using CO2 ice as the fogging agent. The fog contains elements of the CO2 and the user must determine if the residual CO2 components are acceptable in a process environment operating Class 1 to Class 1,000. The 2-3lb output pressure of a CO2 fogger also distorts the airflow patterns, thus adding to the turbulence.