Clean Room Foggers and a Cascade Impactor are provided along with PSL Spheres and Particle Wafer StandardsJames R. Ward2022-01-17T09:19:34-07:00
Applied Physics, Inc. (ÅP™) can be reached at (719) 428-4042 and has been in business since 1992 providing aerosol impactors, such as the MOUDI Cascade Impactor and Nano-MOUDI impactor to Science Universities and Government laboratories. Cleanroom foggers and Di Water foggers are provided to visualize airflow and air turbulence in Semiconductor fabs and pharmaceutical labs. The Model 2300 NPT-2 PSL and Particle Deposition System is used by Semiconductor Device manufacturers to calibrate the size response curves of KLA-Tencor SP1, SP2 and SPX Wafer Inspection Systems; as well as Topcon, Hitachi and ADE Scanning Surface Inspection Systems. 2300 NPT-2E Edge Deposition tools deposit Si, SiO2, Al2O3, TiO2, Si3N4, Ti, W, Cu and Tantalum particles on the silicon wafer edge and bevel to calibrate Rudolph, KLA-Tencor and Raytex edge inspection tools. Metrology managers can reduce wafer particle contamination by investigating particle migration from the wafer edge to the device chip on the silicon wafer. 2300 NPT-2W WET Particle Deposition tools bond process particles onto the wafer surface with a variety of wet liquids.
We also supply CVD Liquid Vaporizers to improve semiconductor ALD films and atomic layer deposition processes such as TEOS and BPSG films. Turbo Vaporizers support thin film deposition for amorphous Si (a-Si) and polycrystalline Si, thin-film solar cells and solar panel processes to improve solar energy conversion efficiency. When using an ultrapure Clean room Fogger or DI Water Fogger in the semiconductor clean room or pharmaceutical lab, clean room managers can monitor airflow turbulence around process tools in the clean room. The Next Generation Impactor and Sample Recovery Systems classify particles for metered-dose inhaler and dry powder inhaler applications in the Pharmaceutical industry.
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