Clean Room Foggers and a Cascade Impactor are provided along with PSL Spheres and Particle Wafer Standards

Applied Physics, Inc. (ÅP™) can be reached at (719) 428-4042 and has been in business since 1992 providing aerosol impactors, such as the MOUDI Cascade Impactor and Nano-MOUDI impactor to Science Universities and Government laboratories. Cleanroom foggers and Di Water foggers are provided to visualize airflow and air turbulence in Semiconductor fabs and pharmaceutical labs. The Model 2300 NPT-2 PSL and Particle Deposition System is used by Semiconductor Device manufacturers to calibrate the size response curves of KLA-Tencor SP1, SP2 and SPX Wafer Inspection Systems; as well as Topcon, Hitachi and ADE Scanning Surface Inspection Systems. 2300 NPT-2E Edge Deposition tools deposit Si, SiO2, Al2O3, TiO2, Si3N4, Ti, W, Cu and Tantalum particles on the silicon wafer edge and bevel to calibrate Rudolph, KLA-Tencor and Raytex edge inspection tools. Metrology managers can reduce wafer particle contamination by investigating particle migration from the wafer edge to the device chip on the silicon wafer. 2300 NPT-2W WET Particle Deposition tools bond process particles onto the wafer surface with a variety of wet liquids.

We also supply CVD Liquid Vaporizers to improve semiconductor ALD films and atomic layer deposition processes such as TEOS and BPSG films. Turbo Vaporizers support thin film deposition for amorphous Si (a-Si) and polycrystalline Si, thin-film solar cells and solar panel processes to improve solar energy conversion efficiency. When using an ultrapure Clean room Fogger or DI Water Fogger in the semiconductor clean room or pharmaceutical lab, clean room managers can monitor airflow turbulence around process tools in the clean room. The Next Generation Impactor and Sample Recovery Systems classify particles for metered-dose inhaler and dry powder inhaler applications in the Pharmaceutical industry.

Distributors are located in Munich, Canada, South America, Paris, London, Tokyo, Seoul, Taipei, Singapore and China. All Products are listed at left. Product highlights are shown below.

Video Highlights:

UltraPure Cleanroom Fogger

Di Water Fogger

Supports Semiconductor Clean Room Guidelines for airflow, pattern, turbulence visualization

Supports USP 797 Pharmaceutical In-Situ Airflow Analysis

PRODUCT HIGHLIGHTS

MOUDI Cascade Impactors Cascade Impactors with sharp cut points for high resolution particle sampling from 10nm to 18um. We offer all MOUDI Cascade Impactor Models, the Nano-MOUDI Cascade Impactor and Non-Rotating Moudi Cascade Impactor More Info		Clean room Foggers UltraPure Clean room Foggers and DI Water Foggers to visualize airflow and turbulence in Class 1 to class 100,000 clean rooms. We offer the a variety of clean room foggers including Model 2001 UltraPure Clean room Fogger and Model 2010, UltraPure Cleanroom Fogger. Here is an overview of Clean room Fogger Technology. More Information

Laser Particle Counters Aerosol particle counters provide counting and sizing from 10nm to 10um. Supports smoke stack, SMOG, diesel and atmospheric contamination measurements. We also offer condensation particle counters. More Information		PSL Wafer Standards and PSL Spheres Calibration Wafers PSL quick check wafers and PSL Wafer Standards, calibration wafers. Duke PSL spheres, 40nm – 4um, pre-mixed or 1% concentration. Si, SiO2, Al2O3, TiO2, Si3N4, Ti, W, Cu, Ta particles in DiH2O solution. More Information

Particle Deposition System We offer particle deposition systems. Produce NIST traceable, PSL Wafer Standards, 20nm to 4um on 200mm & 300mm wafers; calibrate KLA-Tencor, Topcon, ADE Hitachi wafer inspection systems. Deposit Si, SiO2, Al2O3, TiO2, Si3N4, Ti, W, Cu, Ta Particle Wafers to verify WET Bench cleaning performance, make yield improvements. More Information		Next Generation Impactors The Model 170 Next Generation Pharmaceutical Impactor (NGI) is a high-performance, precision, particle-classifying cascade impactor for testing metered-dose, dry-powder, and similar inhaler devices. More Information

MOUDI Cascade Impactors

Clean room Foggers

Laser Particle Counters

PSL Wafer Standards and PSL Spheres

Particle Deposition System

Next Generation Impactors

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