PSL Aerosol Generator

A PSL Generator is designed to challenge ULPA and HEPA cleanroom filters as part of the efficiency certification process. HEPA filters provide 4/9 and 5/9 efficiency ratings, while ULPA filters provide 6/9 and 7/9 ratings.

PSL spheres at 0.3 um are generally used to challenge HEPA filters and detect pin hole leaks, while PSL spheres at 0.15 μm or 0.12 μm are used to challenge ULPA filters and detect pin hole leaks.

The rate of PSL challenge is extremely important, considering a 6/9 filter has the capability to trap 99.9999% of all particles flowing through the filter. That is 1 particle in 1 million that can get through a 6/9 filter, thus in order to challenge a filter with this high efficiency, a high volume PSL generator is required. PSL Generators can achieve this high volume output of 7.2×10 10 at 0.10 μm. The PSL aerosol is mixed with the appropriate airflow and the DI water evaporates from the spheres prior to filter contact.


    • High PSL Generation rate of 7.2×10 10 per minute at 0.10μm PSL sphere size
    • 1×10 8 PSL spheres/ft 3, 0.1 um PSL size, 720 cfm airflow on 2×4′ filters, 90 ft/min face velocity
    • Monodisperse PSL sphere distribution with minimal doublets triplet agglomerates
    • Minimal double and triple charged particles with the PO210 Ionizer (USA use only)
    • High efficiency, patented atomizer to maintain a small DI Water droplet size
    • Consumption of PSL spheres is not wasted with fast turn on/off and fast ramp rates
    • Remote operation control permits the generator to be included in filter test systems
    • Very stable PSL sphere output count over long periods of operation
  • Stainless steel enclosure with superb controls to automate the generator


Features and Specifications are subject to change without notice.

PSL sphere size range 0.1 – 0.5 µm
PSL output rate 7.2 x 10 10 per min @ 0.10 µm
Output flow rate 8 scfm Dry N2 (or Compressed air)
Compressed air (or N2) 8 scfm @ 80 – 100 psig
Remote Control Switch 115 VAC, 60 Hz, 2 A
Dimensions (L x W x H) 18″ x 12″ x 20″