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NIST Standard Reference Material Particle Size Calibration

NIST Standard Reference Material Particle Size Calibration

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NIST, Standard Reference Material, polystyrene microspheres and beads used in Calibration and Contamination Wafer Standards to verify size accuracy of KLA and KLA-Tencor wafer inspection systems.

NIST SRM, Particle Size Standards, PSL Spheres, Size Calibration

NIST SRM particle size standards are the calibration standards known around the world for use with any application that requires a NIST SRM (size reference material) size standard with extremely accurate sizing, narrow size peaks and narrow standard deviation. They can be used for the calibration and validation of a variety of particle sizing equipment including light scattering instruments, electron microscopes, and differential mobility analyzers. They are particularly critical for calibrating surface scanning inspection systems, which are used to detect and characterize defects on silicon wafers. Accurate reference particles are needed to develop and advance the scanning systems for high throughput, cost-effective wafer production that is crucial for device miniaturization. The reference particles may also be used for supplying mono-disperse (single size peak) particles for testing aerosol instruments and are useful for examining aerosol kinetics and evaluating particle detector response.

The certified value for the modal diameter:

60 nm SRM 1964 polystyrene microspheres is 60.39 nm, with an expanded uncertainty of ± 0.63 nm;

100 nm SRM 1963A polystyrene microspheres is 101.8 nm, with an expanded uncertainty of ± 1.1 nm;

269 nm SRM 1691 polystyrene microspheres is 269 nm, with an expanded uncertainty of ± 4 nm;

895 nm SRM 1690 polystyrene microspheres is 895 nm, with an expanded uncertainty of ± 5 nm.

Measurements were performed using differential mobility analysis and are traceable to the He-Ne laser wavelength in air, 632.807 nm, which has been determined with respect to the fundamental standard for length.

Polystyrene Latex Microspheres, 20-900nm, Polystyrene Latex particles – Buy Now

Polystyrene Latex Microspheres, 1um-160um, Polystyrene Latex particles – Buy Now

The spherical diameters are calibrated with linear dimensions calculated by NIST. Spheres are used instead of irregularly shaped particles to minimize the response of laser scanners which are sensitive to shaped particles. The standards are packaged as aqueous suspensions in 5 milliliter (mL) dropper-tipped bottles. The particle concentrations are optimized for ease of dispersion and colloidal stability. The spheres have a density of 1.05 g/cm3 and an index of refraction of 1.59 @ 589 nm, measured at 25 degrees centigrade.

Each package contains a Certificate of Calibration and Traceability to NIST which includes a description of the calibration method and its uncertainty, and a table of chemical and physical properties. A Material Safety Data Sheet, with handling and disposal instructions, is also available. PSL bottles are lot-numbered for convenient technical service and support after the sale.

NIST SRM Spheres 60.4nm, 101.8nm, 269nm and 895nm
Particle Composition Polystyrene Latex, PSL Spheres
Particle Density 0.625 g/cm³
Index of Refraction 1.59 @ 589nm (25°C)
Bottle Size 5 mL
Expiration Date ≤ 24 months
Additives Contains trace amounts of surfactant
Suggested Storage Temp. 2-8°C
Bottle Size and Volume 5ml Bottle
PSL Spheres, NIST SRM, 60.4nm, 101.8nm, 269nm, 895nm

Product Part #

Nominal Diameter

Certified Mean Peak

Std. Dev & CV

Solids Content


 895 nm

895nm ± 5 nm

 0.7 nm



 269 nm

269nm ± 4 nm

 5.3 nm



 101.8 nm

101.8nm ± 1.1 nm

 0.55 nm



 60.4 nm

60.39nm ± 0.63 nm

0.31 nm