Why SSIS Tools Must Be Calibrated to NIST-Traceable Particle Size Standards

SSIS tools (Surface Scanning Inspection Systems) must be calibrated to NIST-traceable particle size standards to ensure particle sizing is consistent, comparable, and actionable across tools, fabs, and time. When particle size data is accurate and standardized, contamination control teams can identify sources faster, reduce false alarms, improve tool matching, and protect yield—especially at advanced nodes […]
