Calibrating SSIS Fleets: Eliminating Tool Drift with Surf-Cal Standards
Unchecked SSIS tool drift compromises semiconductor yield by distorting defect binning and breaking calibration consistency across inspection fleets. Surf-Cal™ Particle Size Standards resolve this variance by delivering NIST-traceable Polystyrene Latex (PSL) microspheres calibrated to rigorous physical reference baselines. Supplied ready-to-use in ultrafiltered DI water at certified $3 \times 10^8$ and $1 \times 10^{10}$ concentrations, they […]
