Implementing Closed-Loop Process Control in Sputter Deposition Systems
Sputter deposition is the backbone of modern semiconductor and coating industries, used to create everything from optical filters to conductive layers on touchscreens. While DC sputtering of metals is relatively straightforward, reactive sputtering, adding a reactive gas like oxygen or nitrogen to form a compound,s introduces significant instability. To maintain high deposition rates and stoichiometric […]
