Calibrating SSIS Fleets: Eliminating Tool Drift with Surf-Cal Standards

Unchecked SSIS tool drift compromises semiconductor yield by distorting defect binning and breaking calibration consistency across inspection fleets. Surf-Cal™ Particle Size Standards resolve this variance by delivering NIST-traceable Polystyrene Latex (PSL) microspheres calibrated to rigorous physical reference baselines. Supplied ready-to-use in ultrafiltered DI water at certified $3 \times 10^8$ and $1 \times 10^{10}$ concentrations, they […]
Surf-Cal Particle Size Standards: The Best Calibration Solution for Your Laboratory
Introduction In the high-precision world of semiconductor manufacturing, accuracy and consistency in particle detection and measurement are paramount. Applied Physics Corporation’s SURF-CAL™ Particle Size Standards represent the gold standard in calibration tools for Scanning Surface Inspection Systems (SSIS). These precision-engineered standards enable semiconductor manufacturers to maintain consistent quality control across multiple inspection tools and facilities, […]
