Applied Physics USA
Polystyrene Latex Beads, Particle Size Standards
Applied Physics USA: PSL Spheres, Polystyrene Micro-Spheres, Particle Size Standards
Applied Physics USA provides PSL Spheres and polystyrene beads as particles size standards for aerosol instrument calibration. Wafer Inspection tools, such as KLA-Tencor SP1, KLA-Tencor SP2, TopCon, ADE and Hitachi also require size calibration, which is accomplished through the use of polystyrene latex spheres. PSL spheres, polystyrene microspheres and beads, are provided in sizes from 20 nm to 10 microns to calibrate the size response curves of the respective wafer inspection systems and laser particle counters. PSL Spheres from 20 nm to about 5 microns are typically used to calibrate the size response of laser particle counters. Polystyrene microspheres can be used to produce Calibration Wafer Standards and Particle Wafer Standards, which are used to calibrate size response of KLA-Tencor Surfscan tools and the older Tencor Surfscan tools
Applied Physics USA
Polystyrene latex beads can be ordered by calling Applied Physics at (719) 428-4042.
Wafer Inspection Systems, referred to as Scanning Surface Inspection Systems, SSIS, most notably from KLA-Tencor and Hitachi, are calibrated using PSL Wafer Standards, which are Prime Silicon wafers deposited with PSL spheres at specific sizes and narrow size distribution. The wafer inspection tools are used to inspect the cleanliness of 300 mm, 200 mm, 150 mm wafer surfaces; bare silicon or film deposited, wafer surface. The SSIS can identify the X/Y location of the PSL spheres and particles, describe the size of each defect as well as summarize an overall particle count on the wafer surface. KLA-Tencor wafer inspection systems, such as Tencor 6200, 6420 and the KLA-Tencor SP1, KLA-Tencor SP2 and KLA-Tencor SP3, are used throughout the semiconductor industry for this application. Topcon has the 3000, 5000 and 7000 series Wafer Inspection Systems. Estek, ADE, Aeronca and Hitachi also provide a variety of wafer inspection systems. Nearly every SSIS produced today is now able to detect at 30 nm particle size sensitivity or better. PSL Spheres are used to represent the particle size standards on the wafer surface. Applied Physics offers PSL Sphere sizes from 20 nm to 160 microns for size calibration, HEPA Filter tests, etc. PSL Spheres can be ordered by calling Applied Physics at (719) 428-4042.
PSL Spheres are used with PSL Wafer Deposition Systems to produce PSL Wafer Standards, also referred to as Particle Wafer Standards. In either case, after the PSL Wafer Standard is produced, it is then placed on a wafer inspection system and scanned by a single laser SSIS or dual laser SSIS. The actual PSL size response is compared to the SSIS size response. If the two peaks do not match, the SSIS must be calibrated.Pre-mixed, high concentration PSL Spheres are for 2300XP1 systems, 2300 NPT-1 systems, 2300NPT-2 and M2300G3 wafer deposition systems.
PSL Spheres, 1% concentration.
The pre-mixed PSL Spheres come in a 50ml bottle, mono-disperse in size (1 size distribution), and are provided from about 47nm to 950nm in size. This PSL solution is poured directly into the nebulizer or atomizer vessel. Pre-mixed is a convenient way of purchasing the polystyrene latex beads, since all the dilution has been accomplished in a very uniform manner, no muss, no fuss, permitting the user to not deal with mixing the polystyrene latex beads using beakers, DI water and ultrasonic trays. The un-mixed PSL material is provided in a 15ml bottle, mono-disperse in size (1 size distribution), and usually in a 1% concentration. These PSL Spheres are provided in a broad range of sizes, but for our purposes, from 20nm to 4um in size. The PSL material must be mixed to the proper dilution or it will be to concentrated or too weak to provide effective results when trying to deposit by one of the above PSL Wafer Deposition Systems. CleanRoom Foggers Link
One materials-and-application path through the Applied Physics particle catalog
Applied Physics carries a broad particle catalog spanning calibration standards, research microspheres and functionalized/nanoparticle materials. Product-level manufacturer and brand information is retained so sourced materials are clearly distinguished from Applied Physics-manufactured products.
Choose particle material from the method—not from the product name
| Material / family | Start here when the requirement is… | Quote variables |
|---|---|---|
| PSL / polystyrene latex | Monodisperse particle-size references, particle-counter/optical calibration, aerosol work, or deposited wafer references. | Instrument/application, nominal size(s), form/concentration, quantity, certificate/traceability. |
| Silica / SiO₂ | Silica reference behavior, contamination-wafer work, optical/material research, or functionalized silica formulations. | Size, surface treatment/functionalization, powder vs suspension, solvent/concentration, quantity. |
| Borosilicate / glass | Powder/particle-size measurement and methods where glass material properties and available size ranges are appropriate. | Method/instrument, nominal size/range, quantity, sample preparation and documentation. |
| Fluorescent / dyed polymer | Imaging, tracking, optical method development, method visibility or research requiring a colored/fluorescent signal. | Size, color/excitation-emission, surface chemistry, dry/suspension form, concentration/quantity. |
| Functionalized / assay particles | Conjugation, binding, lateral-flow, diagnostic or assay-development workflows. | Core material, size, functional group/coating, concentration, conjugation target and assay conditions. |
| Magnetic / metallic nanoparticles | Research workflows where magnetic response, plasmonic/optical properties or specialized surface chemistry are part of the method. | Composition, size, morphology, coating/functionalization, concentration and application. |
Route the buyer from application to the right particle family
Particle-counter calibration
Start with PSL or another method-specified reference size. Capture the instrument/model, channel or target diameter, procedure and documentation requirement.
Particle Counter StandardsSemiconductor / SSIS
Use particle suspensions or deposited wafers according to the inspection tool, substrate, recipe and calibration objective.
Wafer StandardsHEPA / aerosol challenge
Separate the particle reference from the aerosol-generation/dilution method. Specify the test method, target size and equipment context.
PSL Aerosol GeneratorsFluorescent imaging / tracking
Choose size plus fluorescent properties, surface chemistry and form around the imaging or tracking method.
Fluorescent MicrospheresAssays / diagnostics
Choose functional group, particle size, material and concentration around conjugation chemistry and assay architecture.
Functionalized ParticlesMaterials & nanoparticle research
Choose core composition, size, coating/functionalization, concentration/form and method-specific documentation.
Silica & GlassMake the particle inquiry quote-ready
- Instrument, method or end application
- Particle material / composition
- Nominal size or multi-size set
- Dry powder, suspension, concentration or deposited format
- Surface chemistry / fluorescence / coating when relevant
- Package size / quantity and needed date
- Certificate, traceability or other documentation requirement
Do not let the catalog make the engineering decision
Applied Physics has overlapping particle families and many individual size SKUs. The correct quote should be driven by the customer's method and required reference properties—not by whichever product title happens to rank first.
For an accurate quote: use the product quote control so the selected product, variation and quantity remain attached to your request.
Questions engineers and validation teams ask
How should I choose between PSL, silica, glass and fluorescent microspheres?
Start with the measurement or research objective, then choose material, nominal size, size distribution, delivery form, optical/fluorescent requirement, surface chemistry and documentation requirement. Do not substitute materials based only on nominal diameter.
Are all microspheres on Applied Physics manufactured by Applied Physics?
No. The catalog includes Applied Physics products and sourced particle materials. Product-level brand and manufacturer information is retained where verified; products without established provenance are not presented as Applied Physics-manufactured.
What information makes a particle-standard RFQ quote-ready?
Provide the instrument or application, material, nominal size or size set, form or concentration, package/quantity, surface chemistry or fluorescence when relevant, and certificate/traceability requirement.
Microspheres include calibration references and application-specific particle materials
A particle can be monodisperse without being the correct calibration standard for a method. Separate certified size-reference needs from fluorescence, surface chemistry, density and research-material requirements.
Polystyrene / PSL
Size standards, counter checks, aerosol, microscopy and general research.
PSL family →Silica / glass
Different density, refractive behavior and available surface treatments.
Silica & glass →Fluorescent / dyed
Optical particles for imaging, flow, tracer and visualization workflows.
Optical particles →Functionalized
Surface groups and coatings for coupling, assay and diagnostic development.
Functionalized particles →Prepared references
Count controls and deposited wafers when the workflow needs more than loose particles.
Reference pathways →Manufacturer, brand, certificate and traceability details are product-specific. Confirm the quoted product documentation rather than applying one claim across the entire materials catalog.
