Silica Particle Wafer Standards, Silica Particle Size Standards

By |2020-02-10T08:07:00-07:00February 10th, 2020|

In today’s semiconductor metrology labs, the wafer inspection tools, use high powered lasers to scan 200 mm and 300 mm silicon wafers to detect surface particles down to < 30 nanometers. When calibrating high laser power scanning systems, the size calibration is extremely important, in order to detect at 30 nm; and to accurately [...]