Calibration Wafer Standards – 300 mm

Description

A Calibration Wafer Standard is a NIST traceable, PSL wafer standard with Size Certificate included, deposited with monodisperse polystyrene latex beads and narrow size peaks between 50 nm and 10 microns to calibrate the size response curves and scan uniformity of KLA-Tencor Surfscan (SP1, SP2, SP3, SP5, SP5xp, 6200, 6220, 6440), ADE, Hitachi, and Topcon SSIS wafer inspection systems.

Key Features & Specifications:

• Wafer Diameter: 300 mm
• Deposition Options: FULL Deposition across the entire wafer surface, or SPOT Deposition with precisely placed particle size peaks.
• Particle Standards: NIST Traceable Polystyrene Latex (PSL) Spheres (20 nm – 160 µm) or Monodisperse Silica Nanoparticles (50 nm – 2 µm).
• Advanced DMA Deposition: Produced using Model 2300 XP1 Particle Deposition System with Differential Mobility Analyzer (DMA) control to remove unwanted doublets/triplets and deliver narrow size distributions (typically ≤ 3% distribution width).
• Metrology Verification: Used by Semiconductor Metrology Managers to calibrate size accuracy, verify tool-to-tool count efficiency, and evaluate cross-wafer scan uniformity.