Calibration Wafer Standard and absolute calibration standards for Tencor Surfscan, Hitachi and KLA-Tencor tools
Calibration Wafer Standard
A Calibration Wafer Standard is a NIST traceable, PSL wafer standard with Size Certificate included, deposited with monodisperse polystyrene latex beads and narrow size peak between 50nm and 10 microns to calibrate the size response curves of Tencor Surfscan 6220 and 6440, KLA-Tencor Surfscan SP1, SP2 and SP3 wafer inspection systems. A Calibration Wafer Standard is deposited as a FULL Deposition with a single particle size across the wafer; or deposited as a SPOT Deposition with 1 or more particle size standard peaks, precisely located around the wafer standard.
These are the typical Polystyrene Microspheres that customers have deposited on their 75mm to 300mm Calibration Wafer Standards: