Surf-Cal, Microspheres, Pre-Mixed in De-ionized Water for exact concentration used to produce Contamination Wafer Standards and Particle Counter size calibration
SURF-CAL PSL spheres simplify the job of preparing calibration wafers in your facility by providing pre-mixed PSL spheres in a 50ml bottle. Particle sizes correspond to the calibration point sizes required by instrument manufacturers. Particle concentrations are 1 x 10 e10 particles per mL. SEMI manufactures have demanded specific particle sizes to be used when calibrating Scanning Surface Inspection Systems, also referred to wafer inspection tools. Working with instrument manufacturers the SURF-CAL PSL spheres meet SEMI standard M52 (3) and M53 guidelines. Available sizes are critical sizing nodes as defined by the International Technology Roadmap for Semiconductors, ITRS (1).
By depositing SURF-CAL, NIST traceable PSL (polystyrene latex) spheres on bare silicon and pattern wafers, you can perform periodic size calibration checks on your KLA-Tencor, Hitachi, ADE, Topcon SSIS tools and compare your wafer inspection scanner with scanners at other locations. You can also assess the performance of your SSIS at critical stages in the manufacturing process. All products are suspended in deionized, filtered water (DI water) in 50 mL bottles at a concentration of 3 x10e10particles per mL. These PSL Spheres have been sized by Differential Mobility Analyzer (DMA) or other size exclusionary techniques.