Surf-Cal, Particle Size Standards, 50ml Volume, Pre-Mixed to 1x10E10 Concentration / ml

Silica nanoparticles size standards used in Contamination wafer standards and drug delivery.

Surf-Cal, PSL Spheres, Pre-Mixed for Particle Size Calibration of Wafer Inspection System

PSL Spheres, Polystyrene Latex, Surf-Cal Particle Size Standards

SURF-CAL PSL spheres simplify the job of preparing calibration wafers in your facility by providing pre-mixed PSL spheres in a 50ml bottle. Particle sizes correspond to the calibration point sizes required by instrument manufacturers. Particle concentrations are 1 x 10 e10 particles per mL. SEMI manufactures have demanded specific particle sizes to be used when calibrating Scanning Surface Inspection Systems, also referred to wafer inspection tools. Working with instrument manufacturers the SURF-CAL PSL spheres meet SEMI standard M52 (3) and M53 guidelines. Available sizes are critical sizing nodes as defined by the International Technology Roadmap for Semiconductors, ITRS (1).

By depositing SURF-CAL, NIST traceable PSL (polystyrene latex) spheres on bare silicon and pattern wafers, you can perform periodic size calibration checks on your KLA-Tencor, Hitachi, ADE, Topcon SSIS tools and compare your wafer inspection scanner with scanners at other locations. You can also assess the performance of your SSIS at critical stages in the manufacturing process.
All products are suspended in deionized, filtered water (DI water) in 50 mL bottles at a concentration of 3 x1010particles per mL. These PSL Spheres have been sized by Differential Mobility Analyzer (DMA) or other size exclusionary techniques.

Category: PSL Sphere

Description

Description

Surf-Cal Polystyrene Latex Particles, pre-mixed to 1x10e10 concentration per ml, 50 ml volume

Surf-Cal, Particle Size Standards, 47nm – 3um, Part #	Nominal Diameter	NIST Traceable, Certified Mean Peak, Size Distribution	Concentration is Particles per mL	PRE-MIXED, Price, per 50ml Bottle
APPD-047B-50ml	47 nm	47 nm, 4 nm	1×10¹⁰	$1,345.00Add to cart
APPD-064B-50ml	64 nm	64 nm, 3 nm	1×10¹⁰	$1,345.00Add to cart
APPD-083B-50ml	83 nm	83 nm, 4 nm	1×10¹⁰	$1,345.00Add to cart
APPD-092B-50ml	92 nm	92 nm, 4 nm	1×10¹⁰	$1,345.00Add to cart
APPD-100B-50ml	100 nm	100 nm, 3 nm	1×10¹⁰	$1,345.00Add to cart
APPD-125B-50ml	125 nm	126 nm, 3 nm	1×10¹⁰	$1,345.00Add to cart
APPD-155B-50ml	155 nm	155 nm, 3 nm	1×10¹⁰	$1,345.00Add to cart
APPD-200B-50ml	200 nm	202 nm, 4 nm	1×10¹⁰	$1,345.00Add to cart
APPD-204B-50ml	204 nm	204 nm, 4 nm	1×10¹⁰	$1,345.00Add to cart
APPD-215B-50ml	215 nm	220 nm, 3nm	1×10¹⁰	$1,345.00Add to cart
APPD-305B-50ml	305 nm	304 nm, 4 nm	1×10¹⁰	$1,345.00Add to cart
APPD-365B-50ml	365 nm	360 nm, 5 nm	1×10¹⁰	$1,345.00Add to cart
APPD-500B-50ml	500 nm	498 nm, 6nm	1×10¹⁰	$1,345.00Add to cart
APPD-800B-50ml	809 nm	809 nm, 6 nm	1×10¹⁰	$1,345.00Add to cart
APPD-802B-50ml	802 nm	802 nm, 9 nm	1×10¹⁰	$1,345.00Add to cart
APPD-1100B-50ml	1.112 μm	1.112 μm, 0.011 μm	1×10¹⁰	$1,345.00Add to cart
APPD-1600-50ml	1.59 μm	1.59 μm, 0.016 μm	3×10⁸	$1,345.00Add to cart
APPD-2000-50ml	2.01 μm	2.01 μm, 0.019 μm	3×10⁸	$1,345.00Add to cart
APPD-3000-50ml	3.04 μm	3.04 μm, 0.026 μm	3×10⁸

Measurement Methodology:
To assure NIST traceability, the certified diameters of these products were transferred by transmission electron or optical microscopy from NIST standard reference materials (2). The uncertainty was calculated using NIST Technical Note 1297, 1994 Edition “Guidelines for Evaluating and Expressing the Uncertainty of NIST Measurement Results” (4). The uncertainty listed is the expanded uncertainty with a coverage factor of two (K=2). The peak diameter was calculated using approximately the ± 2s range of the particle size distribution. The size distribution was calculated as the standard deviation (SDS) of the whole peak. The Coefficient of Variation (CV) is one standard deviation expressed as a percentage of the peak diameter. The FWHM (full width at Half Maximum) distribution was calculated as the distribution at half of the peak height expressed as a percentage of the peak diameter.
1. “The National Technology Roadmap for Semiconductors”, Semiconductor Industry Association (1999)

2. S.D. Duke and E.B. Layendecker, “Internal Standard Method for Size Calibration of Sub-Micron Spherical Particles by Electron Microscopy”, Fine Particle Society (1988)

3. SEMI M52 — Guide for Specifying Surface Inspection Systems for Silicon Wafers the 130 nm Technology Generation.

4. Barry N. Taylor and Chris E. Kuyatt, “Guidelines for Evaluating and Expressing the Uncertainty of NIST Measurement Results”. NIST Technical Note 1297, 1994 edition, September 1994.

Particle Composition	Surf-Cal Polystyrene Latex Spheres, Particle Size Standards
Concentration	1 x 10¹⁰ particles per mL
Particle Density	1.05 g / cm³
Refractive Index	1.59 @ 589nm (25°C)
Fill Volume	50 mL
Content	Polystyrene microspheres in de-ionized, filtered water
Expiration Date	≤ 12 months

Surf-Cal, Particle Size Standards, 50ml Volume, Pre-Mixed to 1x10E10 Concentration / ml From Applied Physics Inc.Surf-Cal, Particle Size Standards, 50ml Volume, Pre-Mixed to 1x10E10 Concentration / ml From Applied Physics Inc.

Surf-Cal, Particle Size Standards, 50ml Volume, Pre-Mixed to 1x10E10 Concentration / ml

Surf-Cal, PSL Spheres, Pre-Mixed for Particle Size Calibration of Wafer Inspection System

PSL Spheres, Polystyrene Latex, Surf-Cal Particle Size Standards

Description

Surf-Cal Polystyrene Latex Particles, pre-mixed to 1x10e10 concentration per ml, 50 ml volume

PSL Spheres, 450 nm, 15ml bottle volume, Polystyrene Latex Beads, NIST Traceable, Size Calibration Certificate included

PSL Spheres, 90 nm, 15ml bottle volume, Polystyrene Latex Beads, NIST Traceable, Size Calibration Certificate included

PSL Spheres, 600 nm, 15ml bottle volume, Polystyrene Latex Beads, NIST Traceable, Size Calibration Certificate included

PSL Spheres, 220 nm, 15ml bottle volume, Polystyrene Latex Beads, NIST Traceable, Size Calibration Certificate included

PSL Spheres, 200 nm, 15ml bottle volume, Polystyrene Latex Beads, NIST Traceable, Size Calibration Certificate included

PSL Spheres, 20 nm, 15ml bottle volume, Polystyrene Latex Beads, NIST Traceable, Size Calibration Certificate included

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Surf-Cal, Particle Size Standards, 50ml Volume, Pre-Mixed to 1x10E10 Concentration / ml

Surf-Cal, PSL Spheres, Pre-Mixed for Particle Size Calibration of Wafer Inspection System

PSL Spheres, Polystyrene Latex, Surf-Cal Particle Size Standards

Description

Surf-Cal Polystyrene Latex Particles, pre-mixed to 1x10e10 concentration per ml, 50 ml volume

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PSL Spheres, 450 nm, 15ml bottle volume, Polystyrene Latex Beads, NIST Traceable, Size Calibration Certificate included

PSL Spheres, 90 nm, 15ml bottle volume, Polystyrene Latex Beads, NIST Traceable, Size Calibration Certificate included

PSL Spheres, 600 nm, 15ml bottle volume, Polystyrene Latex Beads, NIST Traceable, Size Calibration Certificate included

PSL Spheres, 220 nm, 15ml bottle volume, Polystyrene Latex Beads, NIST Traceable, Size Calibration Certificate included

PSL Spheres, 200 nm, 15ml bottle volume, Polystyrene Latex Beads, NIST Traceable, Size Calibration Certificate included

PSL Spheres, 20 nm, 15ml bottle volume, Polystyrene Latex Beads, NIST Traceable, Size Calibration Certificate included

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