Silica Particle Wafer Standards, Silica Particle Size Standards

By |2022-11-09T13:19:26-07:00February 10th, 2020|Categories: Silica Particles|Tags: , , , , , , , |

Silica Particle Size Standards In today’s semiconductor metrology labs, the wafer inspection tools, use high powered lasers to scan 200 mm and 300 mm silicon wafers to detect surface particles down to < 30 nanometers. When calibrating high laser power scanning systems, the size calibration is extremely important, in order to detect at 30 [...]