clean room fogger, high purity fogger, ultrapure fogger, nitrogen fogger, calibration wafer standards, silica nano-particles, polystyrene latex beads

Applied Physics, Inc.

Clean Room Fogger, CRF4

Ultrapure Nitrogen Fogger, AP35

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Calibration Wafer Standards

PSL Wafer Standard

Contamination Wafer Standards

Particle Wafer Standards

Cleanroom Fogger, CRF2

LN2 Nitrogen Fogger

PSL Spheres, Polystyrene Latex Beads

Silica Nanoparticles in DIH2O, 15ml or 100ml volume

Smoke Studies to Visualize Airflow and Turbulence

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1-720-635-3931 or 303-999-6837


Applied Physics, Inc. has provided clean room foggers and ultrapure cleanroom foggers from 2001 including high purity foggers, ultrapure foggers, LN2 fog generators, CO2 smoke generators and portable glycol smoke machines used in smoke studies of airflow turbulence in sterile rooms, ISO suites, medical operating rooms, barrier isolators and clean rooms. No cleanup is required after fogging. Glycol Portable Foggers are also provided for industrial cleanrooms. The CRF2 and CRF4 Clean Room foggers use ultrasonic cavitation to produce a pure fog. A superb fogger performance comparison can be reviewed at  www.cleanroom-fogger.com to see which fog generator is best for your smoke studies. Clean room foggers support airflow visualization as defined by ISO 14644-3, B7 and Federal Standards 209E. Airflow recovery testing at 100:1 recovery time is supported with the CRF2 Cleanroom Fogger as defined in ISO 14644-3, B12. Applied Physics provides calibration wafer standards, silica contamination wafer standards, particle size standards and PSL Wafer standards. NIST Traceable particle depositions and Size Certificates ensure correct size response of Tencor Surfscan 6200, 6220, 6400 and 6420 wafer inspection tools; as well as KLA-Tencor Surfscan SP1, SP2, SP3, SP5 and SP5xp tools. Room decontamination of harmful organisms in ISO suites, sterile rooms and compound pharmacies is provided using a Dry Fogger. Products with good performance will always out perform products that just look pretty. Contact Applied Physics, Inc. at TEL: 1-720-635-3931 or 303-999-6837.

Clean Room Fogger, CRF2 is a low cost fogger using DI Water or WFI water to produce 0.25 cubic meters (9 cubic feet) fog per minute of 'on demand' fog with 57 ml fog density per minute for about 50 minutes in smoke studies to visualize patterns and turbulence in flow hoods, glove boxes and fume hoods. No cleanup is required and no contamination is emitted to the airflow.
Cleanroom Fogger, CRF4 is a higher volume fogger using DI Water or WFI water to produce 1.25 cubic meters fog per minute of 'on demand' fog with 170 ml fog density per minute for 45 minutes at highest fog volume and 90 minutes at lowest fog volume for smoke studies to visualize airflow patterns and turbulence in small clean rooms, iso suites, sterile rooms, RAB, etc. The CRF4 provides adjustable fog volume, adjustable airflow using touch pad control; or use wireless remote control for operation behind a closed wall. Supports guidelines for Federal Standards 209E, USP 797 Pharmaceutical In-situ airflow analysis, Airflow Visualization Tests for ISO 14644-3 Annex B7. No cleanup is required after fogging with the CRF4.
Cleanroom Ultrapure Fogger, AP35 is a high volume, ultrapure fogger using liquid nitrogen and Deionized Water or Water for Injection to produce about 5 cubic meters fog per minute with 533 ml of fog density per minute providing 20 - 30 feet of visible airflow for smoke studies to visualize airflow, patterns, direction, turbulence, dead zones and velocity for 75 minutes in clean rooms, ISO suites, sterile rooms and medical rooms. No contamination is created and no clean up is required after fogging with the AP35. It is modular in design, providing simple operation in support of ISO 14644-3, Annex B.7 Airflow Test and Visualization; Federal Standards 209E and USP 797 Insitu Airflow Analysis.
CO2 Fogger is a smoke machine using DI Water and CO2 Ice to provide a dense fog of about 6cfm for 8-10 minutes to visualize airflow in ISO suites and sterile rooms. A CO2 fogger works well to video smoke studies and describe airflow, patterns and turbulence in Pharmaceutical ISO suites guided by USP 797 Pharmaceutical In-Situ Airflow Analysis. No clean up is required after CO2 fog evaporation.
Silica Contamination Wafer Standards are deposited with monodisperse, silica nano-particles between 40nm and 2 microns and provided with a NIST Traceable, Size Certificate. It is deposited with a single size as a Full Deposition, or with multiple sizes deposited around the wafer standard as a SPOT Deposition, each size with narrow size peak. Particle wafer standards are provided with a controlled particle count between 1000 and 20000 count. Silica Contamination Wafer Standards are used to calibrate the size accuracy response of scanning surface inspection systems (SSIS) using high powered lasers, such as KLA-Tencor SP2, SP3, SP5, SP5xp and Hitachi wafer inspection tools.
PSL Calibration Wafer Standards are certified, NIST traceable, PSL wafer standards deposited with monodisperse, polystyrene latex spheres between 40nm and 12 microns. A PSL Wafer Standard can be provided with a Full deposition with 5000 to 20000 count. Spot Deposition with multiple spot deps around the wafer have a controlled particle count between 1000 and 2500 per size deposited. Calibration Wafers are used to calibrate the size accuracy of scanning surface inspection systems (SSIS) using low powered lasers, such as Tencor 6200, Tencor 6220, Tencor 6400 and 6420, KLA-Tencor SP1, SP2 and Hitachi wafer inspection tools.
Polystyrene Latex Spheres are NIST Traceable, particle size standards produced with polystyrene latex beads from 20 nanometers to 160 microns. PSL Spheres are highly accurate, size standards with a narrow particle size distribution, suspended in a DI Water solution with a trace surfactant to minimize agglomeration. Polystyrene latex beads are used to create a particle aerosol to challenge the size accuracy of laser particle counters or to produce Calibration Wafer standards.
Silica Nanoparticle Size Standards are spherical and mixed in Di Water solution with 10% concentration of Silica particles. CV is typical 3% in sizes ranging from 40 nm to 2000 nm. Silica nano-particles are available in 15 ml or 100 ml volumes.
Room Sanitizer is used to decontaminate yeast, mold and bacteria from ISO Suites, sterile rooms, compound pharmacies and leaf plants by saturating the room space with a sanitizing agent, such as hydrogen peroxide nano-droplets, which then evaporates to a vapor to contact every part of the room and / or plants to kill off 99.9997% of bio-contamination. USP 1072 recommends a daily bactericidal disinfectant with a weekly or monthly use of a sporicidal agent.
VIDEO HIGHLIGHTS
  Cleanroom Ultrapure Fogger Clean Room Fogger Microbial Air Sampler  
Clean Room Ultrapure Fogger Clean Room Fogger Microbial Air Sampler
Clean Room Fogger, DI water fogger, Cleanroom Ultrapure Fogger, Nitrogen Fogger, Portable Fogger; all are used to visualize airflow, patterns, dead zones and turbulence in smoke studies of clean rooms, sterile rooms, barrier isolators and ISO suites. Guidelines for ISO 14644-3 ANNEX B7, USP 797 Insitu Airflow Analysis and Semiconductor clean rooms are supported. The Microbial Air Sampler is used to monitor unwanted fungal and bacterial growth in ISO 5, ISO 7 and ISO 9 Filling Lines.
PRODUCT HIGHLIGHTS
 

Our 2300XP1 Particle Deposition System deposits PSL Spheres and silica nanoparticles on prime silicon wafers, blank photo masks or your film wafers to produce calibration wafer standards from 40 nanometers to 10 microns to calibrate the size accuracy response of Tencor, KLA-Tencor, Hitachi and Topcon wafer inspection systems. Silica nano-particles have nearly the same refractive index as PSL spheres, thus Silica nonoparticle, laser response is quite similar to PSL laser response. Glass substrates can be deposited from 1 micron to 10 microns to support size calibration of Rudolph tools.

The AP35 Ultrapure Fogger produces 5 cubic meters fog per minute with 533 ml of fog density per minute to provide 20-30 feet of visual airflow. The CRF2 is the lowest cost fogger available producing 9 cubic feet of fog per minute with 57 ml fog density to provide 7-8 feet of visible airflow in fume hoods and barrier isolators. The CRF4 is a mid range fogger providing 1.25 cubic meters of fog per minute with 170 ml of fog density to visualize airflow for 10-15 feet in small clean rooms. Ultrapure clean room foggers, called nitrogen fog generators, produce the highest volume of ultra pure fog, providing an ADJUSTABLE fog volume of 2-5 cubic meters per minute for up to 90 minutes with more than 20 feet visible airflow.

Cleanroom Fogger and Ultrapure Nitrogen Fogger supports USP797 and ISO 14644-3

Clean room Fogger Clean room foggers and ultrapure foggers are smoke generators used in smoke studies to visualize airflow and turbulence with a high purity fog in Class 1 to Class 100,000 clean rooms, sterile rooms and ISO suites. The AP35, Ultrapure Fogger provides 533 ml per minute fog density with a fog volume of up to 5 cubic meters per minute for up to 75 minutes with 20 to 30 feet of visible airflow for smoke studies and 3D airflow modeling in clean rooms, ISO suites, medical rooms and sterile rooms. 3X more fog volume, 2X more fog density and aiflow travel distance, yet the AP35 costs nearly the same as competitive ultrapure foggers. The CRF-2 Cleanroom Fogger and CRF4 CleanRoom Fogger provide lower cost opertion, CRF4 DI Water Fogger to visualize clean room airflow.

Clean Room Fogger, CRF-2 Information

PSL Wafer Standard, Calibration Wafer Standard

Calibration Wafer Standard Calibration Wafer Standards are produced on Prime Silicon Wafers, your FILM Wafers or bare masks. NIST traceable, Polystyrene Latex (PSL) Spheres are used to produce, Calibration Wafer Standards, provided from 40nm to 10um on 100mm to 300mm wafers for calibration of KLA-Tencor Surfscan SP1, SP2, SP3, SP5, SP5xp; Tencor 6200, 6400 and 6420 systems; Topcon, ADE and Hitachi wafer inspection systems. These standards are provided with a single PSL Sphere particle size deposited as FULL Wafer Deposition across the wafer or deposited with multiple Polystyrene latex sphere size peaks, deposited as spot depositions around the prime silicon wafer, film wafer, glass substrate or photo mask surface.

Calibration Wafer Standard Information

   

Polystyrene Latex Spheres and Beads, Silica Nanoparticles, Hydrophobic and Functionalized Silica

PSL Spheres PSL Spheres and polystyrene latex beads with typical 1% concentration in 15ml DI Water for use as particle size standards and aerosol particle challenges; or Surf-Cal, pre-mixed PSL Spheres in 50ml bottles and 1E10 concentration. Functionalized silica and hydrophobic silica in 1Kg increments. Bulk, Dry Powder silica, commercial silicate, functionalized silica, filler in polymers, CMP slurries, nano-composites, high pressure liquid chromatography and mesoporous silica nanoparticles (MSN). Silica Nanoparticles in 15ml of DI Water Solution for size calibration from 20nm to 2 microns. Functionalized silica, hydrophobic silica, silica for polymer filler available in 1-1000 Kg increments.

Silica Nano-Particles Information

DryFog, Disinfectant, Room Sanitizer

Room SanitizerDry Fog, Room Sanitizer provides superb decontamination of bacterial and fungal growth in compound pharmacies, ISO suites, medical rooms and plant growth facilities. The Dry Fogger is designed to kill yeast, mold, gray mold and bacteria. This sanitizing fogger produces a sporicidal agent as an aerosol, bactericidal disinfectant; which then evaporates to a vapor, spreading throughout a room to kill more than 99.997% of fungi and bacteria from physical surfaces and leaf plants. For use in ISO suites, sterile rooms, compound pharmacies and plant growth facilities. 700+ DF2S disinfectant machines are now used for disinfection and sanitizing requirements.

Sanitize Mold, Yeast and Bacteria from Your Facility /a> Information

   

CO2 Fogger and Battery Powered, Portable Fogger

CO2 Fogger CO2 Foggers provide portability and no power cords for smoke studies to visualize airflow and turbulence in Class 1 to 100,000 clean rooms, sterile rooms and ISO suites. The CO2 Fogger is a low cost fogger producing fog using CO2 ice and warm water to produce highly visible airflow with a typical 10 minute operating cycle. The CO2 fogger provides portability and does not require a power cord during operation. CO2 Foggers are typically used in rooms where no power access is provided.

CO2 Fogger Portable, CO2 Fogger, Information

Silica, Contamination Wafer Standard, Particle Wafer Standard

Contamination Wafer Standard Contamination Wafer Standards are produced on Prime Silicon Wafers, your film wafers or blank masks. NIST traceable, Silica nanoparticles, Contamination Wafer Standards deposited with silica nano-particles are provided from 40nm to 2um on 150mm to 300mm wafers to calibrate KLA-Tencor Surfscan SP2, SP3, SP5, SP5xp; Tencor 6200, 6400 and 6420 systems; Topcon, ADE and Hitachi wafer inspection systems. These particle size standards are provided with a single silical particle size deposited as FULL Wafer Deposition across the wafer or deposited with multiple silica nanoparticle size peaks, deposited as spot depositions around the prime silicon wafer, film wafer, glass substrate or photo mask surface.

Silica Calibration Wafer Standard Information