Clean Room Fogger, Liquid Nitrogen Fogger, Nitrogen Fog Generator, Silica Nano-Particles, Polystyrene Latex spheres, Contamination Wafer Standard, Smoke Generator, Smoke Machine


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Applied Physics, Inc.

Applied Physics, Inc. supports

MSP Corporation Products

Applied Physics, Inc. provides contamination wafer standards, silica calibration wafer standards and PSL Wafer standards for Metrology managers. Cleanroom foggers are provided for airflow visualization of Pharmaceutical sterile rooms, ISO suites, barrier isolators and clean rooms. Contact Applied Physics at TEL: 1-720-635-3931. Smoke machines are called DI Water Foggers, CO2 fogger, clean room fogger, liquid nitrogen fogger, nitrogen fog generator, demiwater fogger and ultrapure fogger. Battery operated, portable foggers are also available. Room sanitizers provide decontamination of harmful organisms in ISO suites, sterile rooms and compound pharmacies by saturating a controlled space with a hydrogen peroxide solution. ÅP™ is a trademark of Applied Physics, Inc.

Contamination Wafer Standard is a Certified, NIST Traceable, Size Standard deposited on a prime Silicon wafer with silica particles at a specific size peak and narrow size distribution. 40 nano-meter to 3um particle wafer standards are provided with a spot deposition or full deposition and controlled surface count between 1000 and 10000 particles. Wafer size standards deposited at 100 nano-meters diameter and above are scanned by a KLA-Tencor Surfscan SP1. Wafer standards below 100nm particle diameter are scanned by a KLA-Tencor Surfscan SP5. Contamination Wafer Standards are used to calibrate the size accuracy response of scanning surface inspection systems (SSIS), SEM tools and TEM tools using high powered lasers for detection of surface particle contamination.
Calibration Wafer Standard is a Certified, NIST Traceable, Size Standard deposited on a prime silicon wafer with polystyrene latex spheres at specific PSL Sphere sizes and narrow size distribution between 40nm and 10um. A PSL Wafer Standard can be provided with a spot deposition, multiple spot depositions or full surface deposition and controlled particle count between 100 and 10,000 count for each size deposited. 200mm and 300mm wafer standards deposited at 100nm (nanometers) sphere diameter or more are scanned by a KLA-Tencor Surfscan SP1. PSL wafer standards deposited with polystyrene latex spheres below 100nm are scanned by a KLA-Tencor Surfscan SP5. Calibration Wafer Standards are used to calibrate the size accuracy response of scanning surface inspection systems (SSIS) using Photo Multiplier Tubes or lower powered lasers to detect surface particle contamination.
DI Water Fogger is a portable clean room fogger for airflow visualization of clean room air, patterns and turbulence. No contamination is created and no clean up afterwards is required. Distilled Water or Water for Injection (WFI) is converted to a pure fog vapor for about 60 minutes at 9cfm fog volume to support guidelines for semiconductor clean rooms and USP 797 Pharmaceutical in-situ airflow analysis.
Model 2001, Nitrogen Fog Generator is a cleanroom fogger using Distilled Water and Liquid Nitrogen to create a very dense fog for 35-40 minutes duration providing a constant fog volume of 15cfm to visualize airflow, patterns and turbulence in Pharmaceutical ISO suites, sterile rooms and barrier isolators. No contamination is created and no clean up afterwards is required.
CO2 Fogger is a smoke generator using DI Water and CO2 Ice for airflow visualization to produce a dense fog of about 6cfm for 6-10 minutes. A CO2 fogger works well to video smoke studies to describe airflow, patterns and turbulence in Pharmaceutical ISO suites guided by USP 797 Pharmaceutical In-Situ Airflow Analysis. CO2 Foggers leave no contamination of any kind and no clean up is required after fog evaporation.
Polystyrene Latex Spheres are produced as NIST Traceable polymer beads from 20 nanometers to 160 microns. Polystyrene Latex spheres are highly accurate size standards used to calibrate size accuracy of laser particle counters. PSL spheres are suspended in a DI Water solution at a specific size in an atomizer or nebulizer, which is used to create a particle aerosol with a narrow particle size distribution for calibration of laser particle counters.
Clean Room Fogger sometimes called a smoke generator or smoke machine uses DI Water or WFI water to produce 9cfm of pure fog with on demand fog control for about 60 minutes. No contamination of any kind is created and no clean up is required. Clean room airflow, turbulence, patterns and balance of airflow in smoke studies of Pharmaceutical ISO suites, sterile rooms and barrier isolators, which is a requirement of USP 797 Pharmaceutical In-Situ Airflow Analysis.
Silica Powder is available in bulk, dry powder from 200nm to 2 microns in 2 kilogram increments from 2 Kilo to 200 Kilos. Silica is used in CMP slurries, lens polishing, mesoporous silica nano-particles (MSN), Thin Film, Solar Cell Manufacturing and Nano-Composites.
Silica Nanoparticles are spherical and mixed in 15ml of Di Water solution with 10% concentration of Silica. CV is quite narrow with sizes provided from 20nm to 3 microns, providing a mono-disperse particle size distribution.
Room Sanitizer is used to decontaminate a Compound Pharmacy, ISO Suite, sterile rooms and Medical Rooms by saturating the area with a hydrogen peroxide aerosol, killing off 99.9997% of bio contamination.
  M2001 UltraPure Fogger Clean Room Fogger Microbial Air Sampler  
M2001 Fogger Clean Room Fogger Microbial Air Sampler
Clean Room Fogger, DI Water Fogger, Model 2001 Fogger, Portable Fogger or UltraPure Nitrogen Fogger is used in smoke studies of sterile rooms, barrier isolators and ISO suites, supporting USP 797 guidelines for insitu analysis of airflow, patterns and turbulence. The Microbial Air Sampler is used to monitor unwanted fungal and bacterial growth in ISO 5, ISO 7 and ISO 9 Filling Lines.

Our 2300XP1 Particle Deposition System deposits PSL Spheres and silica nanoparticles to produce contamination Wafer Standards from 40 nanometers to 10 microns on Prime Silicon wafers, blank photo masks or your FILM WAFERS. We can deposit on glass substrates up to 285mm x 285mm, or special applications of 515 x 515mm glass substrates to support Rudolph tools. Contamination Wafer Standards are used for size calibration of KLA-Tencor Surfscan tools, such as surfscan SP1, Surfscan SP2, SP3, SP5, SPx, Surfscan 6420, 6220, 6200, Hitachi and Topcon SSIS wafer inspection systems. Contamination Wafer Standards using PSL Spheres are used to calibrate the size response curves on pattern and non-patterned wafer surface inspection systems. Silica nano-particles have nearly the same refractive index as PSL, thus Silica particle laser response is quite similar to PSL laser response, allowing Silica particles to be used to create true particle, size response curves for the high powered SP5 and SPx Surfscan wafer inspection system. PSL Spheres and Silica particles can be deposited on prime silicon wafers for size calibration of your SSIS tools.

The CRF-2 Clean Room Fogger is priced lower and provides a light weight, white polypropylene enclosure. Either DI Water or WFI Water can be used to provide the second highest fog volume at 9cfm for about 60 minutes. Nitrogen fog generators produce the highest volume of ultra pure fog at 15cfm for about 35-40 minutes using liquid nitrogen and DI Water.

Cleanroom Fogger, DI Water Fogger

Clean room Fogger We offer a variety of cleanroom foggers for smoke studies to visualize airflow and turbulence. The Liquid Nitrogen Fog Generator and Clean Room Fogger are used in smoke studies for Pharmaceutical suites and semiconductor clean rooms. The M2001 Fogger, UltraPure Nitrogen fogger and DI Water Fogger are called smoke generators and used to visually describe air flow, patterns and turbulence in Class 1 to 100,000 rooms and ISO suites.

Cleanroom Fogger, CRF-2 Information

Silica Contamination Wafer Standard and PSL Wafer Standard

Contamination Wafer Standard We produce Contamination Wafer Standards using PSL Spheres or Silica Nanoparticles on Prime Silicon Wafers or your FILM Wafers. NIST traceable, Contamination Wafer Standards and Calibration Wafer Standards are provided from 40nm to 10um particle size on 100mm to 450mm wafers to calibrate KLA-Tencor Surfscan, Topcon, ADE and Hitachi wafer inspection systems.

Calibration Wafer Standard Information


PSL Spheres, Polystyrene Latex Beads, Silica

PSL Spheres PSL Spheres and polystyrene latex beads typical 1% concentration in 15ml DI Water; or Surf-Cal, pre-mixed PSL Spheres.
Silica powder in 2Kg increments, Bulk, Dry Powder Silica for CMP slurries, nano-composites, high pressure liquid chromatography and mesoporous silica nanoparticles (MSN). Silica Nanoparticles in 15ml of DI Water Solution for size calibration from 20nm to 2 microns.

Silica Information

DryFog Room Sanitizer

Room SanitizerDry Fog, Room Sanitizer provides superb decontamination of bacterial and fungal growth in a compound pharmacy, as well as ISO 5, ISO 7 and ISO 9 Pharmaceutical suites. The Dry Fogger is designed to kill microbiological contamination in compound pharmacies, pharma ISO suites. Sanitizing Fogger creates an aerosol disinfectant, which evaporates to a vapor, coming in contact with any surface area (walls, equipment, floors, etc.) killing off fungi and bacteria. Sanitize a Compound Pharmacy.

Room Sanitizer, Room Decontamination Information


Cascade Impactor

Cascade Impactor Cascade Impactor provides sharp cut points for high resolution particle sampling from 10nm to 18um. Information on a cascade impactor, the 13 stage Impactor and Non-Rotating, Cascade Impactors

Cascade Impactor Information

Condensation Particle Counter

Condensation Particle Counter Monitor and count unwanted aerosol particle contamination with water based, Condensation Particle Counter in aerosol, high purity gas lines at 5nm and above with flowrates of 1 LPM and 3 LPM.

Condensation Particle Counter Information