M2001 Fogger, Clean Room Fogger, Silica, Nano-Particles, PSL spheres, Contamination Wafer Standard, Smoke Generator, MOUDI Impactor, Cascade Impactor, Nano-MOUDI


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Applied Physics, Inc.

Applied Physics, Inc. supports

MSP Corporation Products

Applied Physics, Inc. provides Clean Room products such as PSL Spheres, Silica powder in bulk, Silica Nano-particles in DI Water solution, polystyrene latex beads, contamination wafer standard, calibration wafer standards clean room fogger for use in the Semiconductor and aerosol research industries. Please contact Applied Physics at TEL: 1-720-635-3931. Smoke machines are used in Pharmaceutical ISO suites to visualize airflow patterns and turbulence. These types of tools are called DI Water Fogger, CO2 fogger, LN2 fogger, ultrapure fogger, M2001 portable clean room fogger and battery operated, portable fogger to visualize airflow and turbulence in clean rooms, sterile rooms and pharmaceutical ISO suites and barrier isolators. The Room Sanitizer provides biocidal decontamination of ISO suites and compound pharmacies. The cascade impactor and nano-MOUDI are particle samplers used by aerosol science and universities. ÅP™ is a trademark of Applied Physics, Inc.

Contamination Wafer Standard is a Certified, NIST Traceable, Size Standard deposited on prime Silicon wafers with silica particles at specific sizes with narrow size distribution between 40nm and 10um. This particle wafer standard is provided with a spot deposition or full deposition and controlled surface count generally between 1000 and 10000 particles. Wafer standards deposited at 100nm (nanometers) particle size and above are scanned by a KLA-Tencor Surfscan SP1; and wafer standards below 100nm particle size are scanned by a KLA-Tencor Surfscan SP5. Contamination Wafer Standards are generally used to calibrate the size accuracy of scanning surface inspection systems (SSIS) using high powered lasers for surface particle contamination detection.
Calibration Wafer Standard is a Certified, NIST Traceable, Size Standard deposited on a prime silicon wafer with polystyrene latex spheres at specific PSL Sphere sizes, narrow size distribution between 40nm and 10um. A PSL Wafer Standard can be provided with a spot deposition, multiple spot deposition or full surface deposition and a controlled particle count, typically between 100 and 10,000 count for each size deposited. 200mm and 300mm wafer standards deposited at 100nm (nanometers) sphere size and above are scanned by a KLA-Tencor Surfscan SP1. PSL wafer standards deposited with latex spheres below 100nm are scanned by a KLA-Tencor Surfscan SP5. Calibration Wafer Standards are generally used to calibrate the size accuracy of scanning surface inspection systems (SSIS) using Photo Multiplier Tubes or lower powered lasers for surface particle contamination detection.
DI Water Fogger is a portable clean room fogger for airflow visualization of clean room air, patterns and turbulence. Distilled Water or Water for Injection (WFI) is converted to a pure fog vapor for about 60 minutes at 9cfm to support guidelines for semiconductor clean rooms and Pharmaceutical in-situ airflow analysis.
Model 2001 UltraPure Clean Room Fogger is a portable cleanroom fogger using Distilled Water and Liquid Nitrogen (LN2) to create an ultrapure fog for 35-40 minutes duration with a constant volume of 15cfm, which is used to visualize airflow, patterns and turbulence in Semiconductor Clean Rooms and Pharmaceutical ISO suites.
CO2 Fogger is a smoke generator using DI Water and CO2 Ice for airflow visualization to produce a dense fog of about 6cfm for 6-10 minutes, depending on volume of CO2 ice used. The CO2 fog works well in video smoke studies to visually describe airflow, patterns and turbulence in Pharmaceutical ISO suites guided by USP 797 Pharmaceutical In-Situ Airflow Analysis.
PSL Spheres are produced with NIST Size Traceability from 20 nanometers to 160 microns. Polystyrene Latex Spheres are used as size standards with a refractive index about 1.53. PSL spheres are suspended in a DI Water solution at a specific size in an atomizer or nebulizer, which is used to create a particle aerosol with a narrow particle size distribution and be analyzed by a laser particle counter or SSIS wafer inspection system for size response calibration.
Clean Room Fogger is often called a smoke generator and uses DI Water or WFI water to produce 9cfm of pure, on demand vapor fog for 60 minutes; resulting in airflow visualization of clean room air, patterns and turbulence. Foggers are used in smoke studies of Pharmaceutical ISO suites, a requirement of USP 797 Pharmaceutical In-Situ Airflow Analysis.
Silica Powder is available in bulk, dry powder from 200nm to 2 microns in 1 kilogram increments from 1 Kilo to 200 Kilos. Silica is used in CMP slurries, lens polishing, mesoporous silica nano-particles (MSN), Thin Film, Solar Cell Manufacturing and Nano-Composites.
Silica Nanoparticles are spherical and mixed in 15ml of Di Water Solution with 10% concentration of Silica. The CV is quite narrow at very specific sizes from 20nm to 3 microns, providing a monodisperse particle size distribution.
Room Sanitizer is used in a Compound Pharmacy, ISO 5-9 Suites and Medical Rooms which room decontamination. The Dry Fog 2 system is a clean room bio-decontamination system providing a highly effective and safe hydrogen peroxide based, aerosol fog disinfectant.
  M2001 UltraPure Fogger Clean Room Fogger Microbial Air Sampler  
M2001 Fogger Clean Room Fogger Microbial Air Sampler
Clean Room Fogger, DI Water Fogger, Model 2001 Fogger, Portable Fogger and UltraPure LN2 Fogger are used in smoke studies of barrier isolators and ISO suites in support USP 797 guidelines for insitu analysis of airflow, patterns and turbulence. The Microbial Air Sampler is used to monitor unwanted fungal and bacterial growth in ISO 5, ISO 7 and ISO 9 Filling Lines.

Our 2300XP1 Particle Deposition System deposits PSL Spheres, silica nanoparticles to produce contamination Wafer Standards from 40 nanometers to 10 microns on Prime Silicon wafers, blank photo masks or your FILM WAFERS. We also deposit on glass substrates at 285mm x 285mm, or special applications of 515 x 515mm glass substrates to support Rudolph tools. Contamination Wafer Standards are used for size calibration of KLA-Tencor Surfscan SP1, KLA-Tencor Surfscan SP2, Surfscan SP3, Surfscan SP5, Surfscan SPx, Surfscan 6420, Surfscan 6220, Surfscan 6200, ADE, Hitachi and Topcon SSIS, wafer inspection systems. Contamination Wafer Standards using PSL Spheres are used to calibrate the size response curves on pattern and non-patterned wafer surface inspection systems (SSIS tools). Silica nano-particles have nearly the same refractive index as PSL, thus Silica particle laser response is quite similar to PSL laser response, allowing Silica particles to be used to create true particle, size response curves for the high powered SPx Surfscan wafer inspection system. PSL Spheres and Silica particles can be deposited on 450mm to 100mm prime silicon wafers for size calibration of your SSIS tools and laser particle counters.

Our CRF-2 Clean Room Fogger is priced lower with a light weight, white polypropylene enclosure using DI Water or WFI Water to provide the second highest fog volume at 9cfm for 60 minutes. The The M2001 portable fogger produces the highest volume of fog at 15cfm for about 35-40 minutes using LN2 and DI Water.

Bulk Silica powder is used in CMP slurries, which is a chemical, mechanical polish of prime silicon wafers and glass lenses. Nano-MOUDI and Cascade Impactor are provided to Science Universities and laboratories for aerosol research. Applied Physics staff know our products very well and provide superb customer support.

Cleanroom Fogger, DI Water Fogger

Clean room Fogger We offer a variety of cleanroom foggers for smoke studies to visualize airflow and turbulence. The M2001 LN2 Fogger and Clean Room Fogger are used in smoke studies for Pharmaceutical suites and semiconductor clean rooms. The M2001 Fogger, UltraPure LN2 fogger and DI Water Fogger are called smoke generators and used to visually describe air flow, patterns and turbulence in Class 1 to 100,000 rooms and ISO suites.

Cleanroom Fogger, CRF-2 Information

Particle Contamination Wafer Standards and PSL Wafer Standards

Contamination Wafer Standard We produce Contamination Wafer Standards using PSL Spheres or Silica Nanoparticles on Prime Silicon Wafers or your FILM Wafers. NIST traceable, Contamination Wafer Standards and Calibration Wafer Standards are provided from 40nm to 10um particle size on 100mm to 450mm wafers to calibrate KLA-Tencor Surfscan, Topcon, ADE and Hitachi wafer inspection systems.

Calibration Wafer Standard Information


PSL Spheres, Polystyrene Latex Beads, Silica

PSL Spheres PSL Spheres and polystyrene latex beads typical 1% concentration in 15ml DI Water; or Surf-Cal, pre-mixed PSL Spheres.
Silica powder in 2Kg increments, Bulk, Dry Powder Silica for CMP slurries, nano-composites, high pressure liquid chromatography and mesoporous silica nanoparticles (MSN). Silica Nanoparticles in 15ml of DI Water Solution for size calibration from 20nm to 2 microns.

Silica Information

Condensation Particle Counter

Condensation Particle Counter Monitor and count unwanted aerosol particle contamination with water based, Condensation Particle Counter in aerosol, high purity gas lines at 5nm and above with flowrates of 1 LPM and 3 LPM.

Condensation Particle Counter Information


Cascade Impactor, Nano MOUDI and MOUDI Impactor

Cascade Impactor Cascade Impactor provides sharp cut points for high resolution particle sampling from 10nm to 18um. We offer the MOUDI and Nano-MOUDI, cascade impactors, the Nano-MOUDI Impactor and Non-Rotating, Cascade Impactors

Cascade Impactor Information

DryFog Room Sanitizer

Room SanitizerDry Fog, Room Sanitizer provides superb decontamination of bacterial and fungal growth in a compound pharmacy, as well as ISO 5, ISO 7 and ISO 9 Pharmaceutical suites. The Dry Fogger is designed to kill microbiological contamination in compound pharmacies, pharma ISO suites. Sanitizing Fogger creates an aerosol disinfectant, which evaporates to a vapor, coming in contact with any surface area (walls, equipment, floors, etc.) killing off fungi and bacteria. Sanitize a Compound Pharmacy.

Room Sanitizer, Room Decontamination Information